Semiconductor Facilities Solution
Semiconductor FAB Equipment Asset Management
Unify equipment location and chamber replacement history across FABs and apply the same asset standard to new facilities.
Manage equipment-to-chamber configuration and replacement history
Process equipment, chambers and attached modules carry a general purpose ORBRO Tag linked to their asset number. Location data collected by TwinTracker AoA is stored in ORBRO Server, and ORBRO OS shows equipment location, registered configuration relationships, and movement and replacement history.
TwinTracker AoA
Collect BLE signals from trackers and mobile assets along FAB aisles and equipment zones, with zone detection or AoA positioning based on required accuracy.
Equipment and Chamber Configuration
Connect primary equipment, chambers, and attached modules into a single equipment configuration. Even when equipment moves or a chamber is replaced, change history stays continuous under the same asset number.
EQ ID-Based Asset Registration
Link EQ Master Code, EQ ID, asset number, and tracker ID so field equipment matches the asset register.
Equipment-to-Chamber Relationship
The identifiers of the general purpose tags on main equipment, chambers and attached modules are linked to their respective asset numbers. The equipment configuration registered in the asset register is checked against received location data, and when a chamber is replaced the linked target and change time are updated.
Equipment Move and Chamber Replacement History
Store previous zone, current zone, and movement time and compare old and new configurations after a chamber change.
Asset information and inspection status lookup
Check equipment code, inspection status and assigned zone in ORBRO OS. Tag information linked to the asset number is viewed alongside to reconcile the asset register with field equipment. When equipment moves or a chamber is replaced, review the registered configuration and change history to sort out what needs attention.
Integration of FAB operations data
Connect the process history of wafers and carriers and the location records of maintenance assets to equipment data. Shared asset information accumulates for per-fab asset audits, maintenance, and digital twin use.
Wafer and FOUP Process History Integration
Connect MES Lot and wafer IDs with AMHS FOUP movements to review the equipment and process zones visited by each carrier.
Maintenance Equipment and Cart Search
Search the current zone and last-seen time of measuring tools, maintenance equipment, and transport carts.
FAB BLE Infrastructure Health
Monitor BLE AP connectivity, receive quality, last communication, and backhaul recovery status.
EAM and Digital Twin Integration
Send equipment location, configuration, and movement history to EAM and align MES and AMHS records through the same EQ ID.
Recommended Products
Components Based on ORBRO OS
Each solution operates with various products connected on top of ORBRO OS. Configurations can be flexibly adjusted depending on the scope of application and on-site conditions.
UWB Location Tracking
UWB Location Tracking
Enhance worker safety and precisely manage the movement of assets and equipment through real-time tracking, improving productivity and operational efficiency at the same time.
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ORBRO OS2
ORBRO OS2
Align location, video, and sensor data on a spatial layer to turn all on-site situations into a single operational workflow.
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AoA Location Tracking
AoA Location Tracking
Beyond simple coordinates, this solution leverages signal angles to precisely identify movement direction and paths. It supports access control, enhanced security, and customer flow analysis as a next-generation RTLS solution.
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BLE Location Tracking
BLE Location Tracking
BLE is an optimal technology for managing large-scale assets simultaneously at low cost. It enables real-time monitoring of thousands of assets, supporting efficient operations and cost reduction.
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